6th December 2006

Equipment Makers Showcase New Systems at SEMICON Japan Show

At the SEMICON Japan Show held December 6-8 at the Makuhari Messe (Nippon Convention Center) in Chiba, Japan, leading equipment makers were showcasing their latest wares. All manner of equipment and materials ranging from controllers through to I-Line steppers were on show.

Advanced Energy KK says it will feature the Aera EPV-100AW exhaust pressure controller during SEMICON Japan. It also will showcase its Litmas RPS 1501 and 3001 remote plasma source platform, Navigator digital matching network as well as other products.

The Aera EPV-100AW exhaust pressure controller is a patented technology that enables user selection of either "absolute" or differential control of a process chamber's exhaust pressure.

The EPV enables precise control of exhaust pressure and, thereby, of oxide film thickness -- regardless of atmospheric pressure changes, such as weather conditions, house exhaust-pressure fluctuations or altitude.

The EPV's superior durability, reliability and reduced power consumption enable improved yield and lower cost of ownership.

Also showcased will be AE's Litmas RPS 1.5 kW and 3 kW integrated plasma source and power-delivery systems.

The Litmas RPS is well suited to deliver reactive gas specie fluxes for process applications such as wafer pre-clean, photoresist strip and thin-film deposition.

Its small footprint, high performance, ease of use and low cost of ownership allow process engineers to focus on developing critical plasma-based processes with lower device damage, higher throughput and higher yields.

In addition, in AE's booth #4B-501 will be the Navigator, which is equipped with microprocessor-controlled stepper motor circuitry and digital, user-selectable tuning algorithms for high-power solar and FPD applications.

The Navigator matching network minimizes reflected power by automatically tuning the complex impedance of a coupled plasma.

An optional, internal Z'Scan(R) RF sensor allows real-time measurement and analysis of process power and impendence, providing the ability to identify and significantly reduce process variability.

The Navigator digital matching network provides advanced match technology for rapid, accurate and reliable matching across a wide range of load impedances.

Also exhibited will be the company's new line of Sekidenko optical fiber thermometers (OFTs) and emissometers comprised of the OR4000T, OR4000E, and the OR400T family of products.

AE's OFTs and emissometers provide industry-leading performance in non-contact temperature measurement for RTP, HDP-CVD, MO-CVD, UV cure and a variety of other semiconductor processes.

Web: www.advanced-energy.com