- 12 June 2006 -

AFM receives award

Veeco Instruments Inc., announced that its Dimension family of automated atomic force microscopes (AFMs) has received recognition at two leading semiconductor manufacturers. After comprehensive evaluation, Veeco's Dimension X AFM has been selected as the "tool of choice" by a leading U.S. semiconductor manufacturer for use in a number of important metrology applications. In addition, the customer recently selected Veeco's Dimension X3D as the reference metrology tool of choice for optical proximity correction (OPC) applications for three-dimensional metrology. A second customer, a leading Taiwanese foundry, chose the Dimension X3D as a reference metrology tool for key process levels.

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