- 12 June 2006 -

Closing the loop

PI (Physik Instrumente) L.P., has a new closed-loop P-628.2CD XY piezoelectric stages. The precision flexure-guided scanning stages provide a record travel range of 1000 µm and allow nanometrology / precision microscopy instrument designers to probe much larger areas than before. A lower cost, single axis version is also offered. Typical applications include Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry, Nanopositioning, Quality Assurance as well as semiconductor technology. Features include a 1000µm XY-Travel to allow probing larger parts and closed-loop digital control for up to 99.98% position accuracy and resolution is <1nm.

http://www.pi-usa.us/

 




 
 


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