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- 12 June 2006 -
Closing the loop
PI (Physik Instrumente) L.P., has a new closed-loop P-628.2CD
XY piezoelectric stages. The precision flexure-guided scanning
stages provide a record travel range of 1000 µm and
allow nanometrology / precision microscopy instrument designers
to probe much larger areas than before. A lower cost, single
axis version is also offered. Typical applications include
Scanning Probe Microscopy, Nanometrology, Biotechnology, Interferometry,
Nanopositioning, Quality Assurance as well as semiconductor
technology. Features include a 1000µm XY-Travel to allow
probing larger parts and closed-loop digital control for up
to 99.98% position accuracy and resolution is <1nm.
http://www.pi-usa.us/
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