- 12 June 2006 -

Film curing systems proving popular

Axcelis Technologies, Inc. has secured two new customer placements for its RapidCure FC film curing system. The customers, located in the USA and Asia, are deploying Axcelis' RapidCure technology for a wide variety of emerging UV assisted curing applications critical to the development of sub-65nm devices. The systems began shipping in the second quarter.

http://www.axcelis.com