- 22 June 2006 -

New Veeco Instruments' GEN200 orders include lasers and oxide-on-silicon MBE

Veeco Instruments Inc., the semiconductor process equipment and instrumentation company, has received two orders for its GEN200 MBE System. One is from IPG Photonics, which will use Veeco’s GEN200 MBE for the production of high-quality GaAs-based lasers, and the other is from an unnamed 'leading electronics manufacturer' in a deal which includes a technology collaboration focused on depositing oxide films on silicon wafers with MBE.

Oxford, MA, USA, based IPG Photonics is a top designer, manufacturer and seller of unique fibre lasers and amplifiers and diode lasers that enable a growing number of applications in the materials processing, telecom, medical, aerospace, government and scientific markets.

The second system order from a leading electronics manufacturer also includes a technology development collaboration utilizing a GEN200 at Veeco’s St. Paul, MN, USA, MBE Process Integration Center (PIC). The collaboration is focused on depositing oxide films on silicon wafers with MBE technology. The process development will occur in parallel to the manufacturing of an identical system that will be delivered to the customer after completion of the process development.

Jeffrey Hohn, Vice President, General Manager, Veeco MBE Operations commented, “These orders signify further adoption of Veeco’s cluster-based systems for production applications. Our PIC provides customers with the unique ability to qualify production processes scaled from research systems and to work together to expand MBE technology to new materials and substrates.”

The GEN200 MBE system delivers exceptional wafer quality for lab or fab applications. Its cluster tool design provides the industry’s most cost effective 4x4” epiwafer growth of devices such as pump lasers, vertical cavity surface-emitting lasers (VCSELs) and heterojunction bipolar transistors (HBTs). Its cluster tool architecture minimizes clean-room space, increases throughput and allows for growth of different materials in connected modules.

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