- 22 June 2006 -

Rudolph’s new TrueADC software improves speed and accuracy

Rudolph Technologies, Inc. announced the new TrueADC™ Automatic Defect Classification (ADC) system. TrueADC offers a unique Dynamic Defect Library function that facilitates expansion of the library to adjust easily for new defects or for process variation common to most production lines without specific engineering involvement. TrueADC has been in limited release at select sites for several months, during which time Rudolph has received multiple repeat orders from top-tier semiconductor manufacturers.

“We are thrilled by the rapid acceptance of this new capability,” said Mike Plisinski, general manager of Rudolph’s Data Analysis and Review Business Unit. “We believe we now have a product that lives up to the expectations customers have held so long for ADC. We focused on the two major barriers to wide acceptance of ADC technology: performance and cost of ownership. By quadrupling the amount of information we extract from an image, as compared to current technologies, and adding unique automated recipe management capabilities, our customers are realizing better performance across a broader range of defects with minimal specialized training to maintain that performance.”
The Dynamic Defect Library lets users add new defect classifications quickly and easily so that system performance continually improves. Rudolph will provide a custom pre-shipment library development based on customer-provided defect images, allowing a very short time to put the system into production. New defect data from unclassified defects can be transferred seamlessly to TrueADC from Rudolph’s Harmony ASR™ defect review software. The robust design of the database and search functions allows virtually unlimited expansion without impact on speed and accuracy, enabling a single installation to support a large number of tools and processes throughout the fab.

“In recent evaluations, customers report that TrueADC has provided the fastest and most accurate results when compared with other current offerings,” said Mayson Brooks, vice president of Global Inspection Sales at Rudolph. “Our customers are particularly impressed by the ease with which we have been able to adapt the library to their specific products and processes and keep the library performance high with little-to-no maintenance.”

The Data Analysis and Review Business Unit is dedicated to advanced software solutions to enable the next level of process automation. These products can be independent fab solutions or packaged to support new and existing metrology or inspection tools. Rudolph customers can experience an increased benefit from their toolsets with the addition of new advanced analysis software. Additionally, Rudolph fab-wide packages are available to anyone who needs advanced process-centric automation and analysis software.

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