- 24th October 2006 -

US Army Supports Kyma Native Non-Polar GaN substrates

Thomas Swan MOCVD Order for AIXTRON from Major Korean University CNU
AIXTRON AG announced that Chonbuk National University, CNU, has ordered a Thomas Swan Close Coupled Showerhead (CCS) epitaxial growth system in second quarter of 2006. It will be supplied in the 3x2-inch wafer configuration and will be used for the development and production of high-brightness gallium nitride based LEDs. The MOCVD system will be installed at CNU’s state-of-the-art cleanrooms in Dukjin-Ku, Chonju, South Korea.
Since its inception, CNU has established a world-class reputation as a leading R&D centre for advanced optoelectronics. The university plays a key role in the education and qualification of future engineers for leading LED manufacturers at South Korea and worldwide.
CNU chose the new system following its successes with their first Thomas Swan system, said Professor Chang-Hee Hong of SPRC (Semiconductor Physics Research Center) of CNU. He added: “We have been one of the first users of Thomas Swan CCS reactors and have built up a strong relationship with AIXTRON and its local support and service team. We find the Thomas Swan Close Coupled Showerhead system to be well-matched to our requirements for very good process flexibility, uniformity in thickness, doping, and composition. These give the CCS clear advantages compared to other vertical reactors, notably in terms of stability and excellent precursor utilization. Together with our existing system we will have an excellent platform on which to base our research into high-brightness gallium nitride based LED structures”.
This is in addition to AIXTRON AG’s earlier orders for MOCVD tools to major customers in Taiwan: Visual Photonics Epitaxy Co. Ltd. (VPEC) which has ordered two AIX 2600 G3 systems and an AIX 2600G3 HT mass production MOCVD system has been ordered by SemiLEDs (Semi-Photonics).
Web: www.aixtron.com