- 24 th October 2006 -

Trio of MOCVD orders for AIXTRON

AIXTRON AG has revealed two more orders for MOCVD tools to major customers in Taiwan. Visual Photonics Epitaxy Co. Ltd. (VPEC) has ordered two AIX 2600 G3 systems in the third quarter of 2006. Secondly, an AIX 2600G3 HT mass production MOCVD system has been ordered by SemiLEDs (Semi-Photonics).
VPEC’s new MOCVD tools, with 12x4-in or 7x6-in wafer configurations are for the production of HBTs and HEMTs or with the 49x2-inch wafer configuration for the production of LEDs, will be installed at the company’s state-of-the-art manufacturing facility in Ping-Jen City, Taoyuan, Taiwan. VPEC will be using the systems to increase its current epiwafer production capacity.
Dr. Jim Liu of VPEC said: “VPEC has operated AIXTRON systems for nearly ten years now and we are completely satisfied not only with the AIXTRON reactors but also with the responsive support and service. The AIXTRON MOCVD systems provide flexibility and are cost-effective which matches our plans for the expansion of epitaxial wafer production.”
The order for Semi-Photonics is for an AIX 2600G3 HT system, with a 24x2-in configured reactor to be installed alongside SemiLEDs' several other existing AIXTRON reactors. It will provide additional production capacity for SemiLEDs’ unique high performance vertical GaN-based LEDs.
Trung Doan, CEO of SemiLEDs said, "We have a very good experience with AIXTRON Planetary Reactor systems and now we look forward to expanding our capacity to meet the growing market demand for our high end vertical LEDs on Metal Alloy Substrate. We are very happy with its good process flexibility, reliability and reproducibility."
Web: www.aixtron.com