- 24th October 2006 -

Osram picks SUSS photolith for HB-LEDs

SUSS MicroTec reports that Osram Opto Semiconductors recently placed additional follow-on orders for SUSS LithoFab200 Clusters, which are specifically used in volume production for the manufacturing of High Brightness LEDs.

The SUSS LithoFab200 cluster system consists of coat, bake, align, expose and develop cells and has been selected for its superior ability to safely handle fragile substrates as well as for its high productivity and for its high yield at lowest possible cycle times.
A new concept of the exposure cell based on the successful MA200Compact Mask Aligner further optimizes alignment accuracy, thereby widening the process window for a variety of applications. The novel SUSS DirectAlign option allows for an alignment accuracy down to 0.5 micron (3 sigma), the highest performance available for a mask aligner today.

Gerhard Maihöfner, VP Osram Opto Semiconductors: "We are pleased to be expanding our relationship with SUSS MicroTec. The new generations of advanced High Brightness LEDs are sold in a highly competitive market environment, and we therefore demand the best possible quality, precision and cost of ownership from our production equipment. Our work with the LithoFab200 System is a vital part of our continuing efforts to provide our customers with cutting edge LED solutions. In order to meet the aggressive schedules for cost control in all aspects of the LED manufacturing process we have to rely on suppliers with trusted manufacturing capacity and performance records in the field of production. We use SUSS MicroTec equipment in production for several applications and we respect SUSS' capability and depth of know-how in the field."

"Osram Opto Semiconductor's success in the field of high brightness, high power LED's is highly regarded in the industry", says Rolf Wolf, managing director of SUSS MicroTec Lithography Division. "We are committed to support Osram with our LithoFab200, a cluster which enables the streamlining of the LED production process by automating and integrating all photolithography process steps, namely coat, bake, expose and develop, in one modular cluster system. With its production proven equipment design the LithoFab200 enables exceptional process scalability and fast time-to-market for new device designs, while reducing cycle times and excess wafer inventory."

Web: www.osram-os.com and www.suss.com